Mcleanhenson8460

Nano-steps, as classical nano-geometric reference materials, are very important for calibrating measurements in the semiconductor industry; therefore, controlling the height of nano-steps is critical for ensuring accurate measurements. Accordingly, in this study nano-steps with heights of 1, 2, 3 and 4 nm were fabricated with good morphology using atomic layer deposition (ALD) combined with wet etching. The roughness of the fabricated nano-steps was effectively controlled by utilizing the three-dimensional conformal ALD process. Moreover, the relationship between the surface roughness and the height was studied using a simulation-based analysis. Essentially, roughness control is crucial in fabricating nano-steps with a critical dimension of less than 5 nm. In this study, the minimum height of a nano-step that was successfully achieved by combining ALD and wet etching was 1 nm. Furthermore, the preconditions for quality assurance for a reference material and the influencing factors of the fabrication method were analyzed based on the 1 nm nano-step sample. Finally, the fabricated samples were used in time-dependent experiments to verify the optimal stability of the nano-steps as reference materials. This research is instructive to fabricate nano-geometric reference materials to within 5 nm in height, and the proposed method can be easily employed to manufacture wafer-sized step height reference materials, thus enabling its large-scale industrial application for in-line calibration in integrated circuit production lines.This paper presents the vibration response analysis and optimal structural design of a microgripper driven by linear ultrasonic motors (LUMs) dedicated to improving end-point positioning accuracy. Based on structural vibration theory, a parametric vibration response model of the microgripper finger was established, and the relative sensitivities of the structural and material parameters that affect the vibration amplitude of the fingertip were calculated within the structural and material constraints. Then, according to the sensitivity calculation results, a multidimensional constrained nonlinear optimization model was constructed to suppress the vibration of the end-effector. The improved internal penalty function method combined with Newton iteration was adopted to obtain the optimal structural parameters. Finally, the vibration experimental results show that the vibration amplitude of the initial microgripper fingertip is 16.31 μm, and the value measured after optimization was 2.49 μm, exhibiting a reduction of 84.7%. Therefore, the proposed optimal design method can effectively restrain the vibration of the microgripper end-effector and improve manipulation stability.This article presents a new approach to determining the viscosity of Newtonian fluid. The approach is based on the analysis of the secondary Dean flow in a curved channel. The study of the flow patterns of water and aqueous solutions of glycerin in a microfluidic chip with a U-microchannel was carried out. The advantages of a microfluidic viscometer based on a secondary Dean flow are its simplicity, quickness, and high accuracy in determining the viscosity coefficient of a liquid. A viscosity image in a short movie represents fluid properties. It is revealed that the viscosity coefficient can be determined by the dependence of the recirculation angle of the secondary Dean flow. The article provides a correlation between the Dean number and the flow recirculation angle. The results of the field experiment, presented in the article, correlate with the data obtained using computational fluid dynamics and allow for selecting parameters to create microfluidic viscometers with a U-shaped microchannel.Ginsenoside, known as a natural substance, is a saponin component in ginseng and has various effects, such as antibacterial, antioxidant, and anti-inflammatory effects. In addition, gold nanoparticles can realize various optical and physical properties according to particle size and shape. For polymer polymerization, ginsenoside and gold nanoparticles were used as additives and copolymerized with a basic silicone hydrogel material. As gold nanoparticles, spherical and rod-shaped particles were used, and basic physical properties, such as water content, refractive index, and wettability of the prepared ophthalmic lenses, were measured. As a result of measuring the physical properties of the resulting polymer, it was found that the contact angle decreased by about 1.6% to 83.1% as the addition ratio of ginsenoside increased. In addition, as the addition ratio of metal nanoparticles increased, the refractive index was found to increase regardless of the shape of the nanoparticles. In addition, in the case of water content, the spherical shape gradually decreased according to the addition ratio, while the rod shape gradually increased according to the addition ratio. Therefore, it was found that the addition of ginsenoside, known as a saponin-based natural substance, has excellent wettability, and gold nanoparticles with different shapes have different properties. Thus, it is judged that the resulting copolymer can be utilized as a variety of highly functional ophthalmic polymer materials with high refractive index and high wettability.Here, we report the successful incorporation of group I elements (K, Na, Li) to ZnO nanowires. Three distinct (2, 4, and 6 wt.%) doping concentrations of group I elements have been used to generate high piezoelectric voltage by employing a vertically integrated nanowire generator (VING) structure. X-ray photoelectron spectra (XPS) indicated the seepage of dopants in ZnO nanowires by substitution of Zn. Shallow acceptor levels (LiZn, NaZn, KZn) worked as electron trapping centers for intrinsically n-type ZnO nanowires. Free moving electrons caused a leakage current through the nanowires and depleted their piezoelectric potential. Reverse leakage current is a negative factor for piezoelectric nanogenerators. A reduction in reverse leakage current signifies the rise in output voltage. A gradual rise in output voltage has been witnessed which was in accordance with various doping concentrations. K-doped ZnO nanowires have generated voltages of 0.85 V, 1.48 V, and 1.95 V. For Na-doped ZnO nanowires, the voltages were 1.23 V, 1.73 V, and 2.34 V and the voltages yeilded for Li-doped ZnO nanowires were 1.87 V, 2.63 V, and 3.54 V, respectively. Maximum voltage range has been further enhanced by the surface enrichment (oxidized with O2 molecules) of ZnO nanowires. Technique has been opted to mitigate the screening effect during an external stress. After 5 h of oxidation in a sealed chamber at 100 ppm, maximum voltage peaks were pronounced to 2.48 V, 3.19 V, and 4.57 V for K, Na, and Li, respectively. A low-cost, high performance mechanical transducer is proposed for self-powered devices.Nanoparticles are widely used in the pharmaceutical industry due to their high surface-to-volume ratio. Among the many techniques used to obtain nanoparticles, those based on supercritical fluids ensure reduced dimensions, narrow particle size distributions, and a very low or zero solvent residue in the powders. This review focuses on using supercritical carbon dioxide-based processes to obtain the nanoparticles of compounds used for the treatment or prevention of cancer. The scientific literature papers have been classified into two groups nanoparticles consisting of a single active principle ingredient (API) and carrier/API nanopowders. Various supercritical carbon dioxide (scCO2) based techniques for obtaining the nanoparticles were considered, along with the operating conditions and advantages and disadvantages of each process.In this paper, the surface roughness of SiC ceramics was investigated in laser-assisted machining (LAM) processes; machine learning was used to predict surface roughness and to optimize the process parameters, and therefore, to ultimately improve the surface quality of a workpiece and obtain excellent serviceability. First, single-factor turning experiments were carried out on SiC ceramics using LAM according to the material removal mechanism to investigate the variation trend of the effects of different laser powers, rotational speeds, feed rates, and cutting depths on surface roughness. Then, laser power, rotational speed, feed rate and cutting depth were selected as the four factors, and the surface roughness was used as the target value for the orthogonal experiments. The results of the single-factor experiments and the orthogonal experiments were combined to construct a prediction model based on the combination of the grey wolf optimization (GWO) algorithm and support vector regression (SVR). The coefficient of determination (R2) of the optimized prediction model reached 0.98676 with an average relative error of less than 2.624%. Finally, the GWO algorithm was used to optimize the global parameters of the prediction model again, and the optimal combination of process parameters was determined and verified by experiments. The actual minimum surface roughness (Ra) value was 0.418 μm, and the relative error was less than 1.91% as compared with the predicted value of the model. Therefore, the prediction model based on GWO-SVR can achieve accurate prediction of the surface roughness of SiC ceramics in LAM and can obtain the optimum surface roughness using parameter optimization.Accelerometers based on outputting amplitude ratios in weakly coupled resonators (WCRs) are attractive because their parametric sensitivity is higher by two or three orders of magnitudes than those based on outputting frequency. However, the impact of temperature on the coupler is a key factor in accelerometer applications. This paper proposed a novel mode-localized WCR accelerometer with a temperature compensation mechanism, with sensitive elements incorporating a double-ended tuning fork (DETF) resonator, clamped-clamped (CC) resonator, and a micro-lever coupler. The DETF out-of-phase mode is utilized, which is only sensitive to temperature, to measure the temperature change of WCRs and complete the temperature compensation using the compensation algorithm. This proposed method has no time delay in measuring the temperature of sensitive elements and no temperature difference caused by the uneven temperature field. The parametric sensitivity in amplitude ratio (AR) to acceleration drifting with temperature was theoretically analyzed, and the novel device was designed and fabricated by a silicon-on-glass process. Both simulation and experiment results demonstrated that the coupling stiffness drifted with temperature, which resulted in the drifts of its sensitivity to acceleration and zero-bias stability. Using the intrinsic mode of WCRs, in terms of the DETF out-of-phase mode, as an in situ thermometer and carrying out the temperature compensation algorithm, the drift of zero bias could be suppressed from 102 mg to 4.5 mg (g is the gravity acceleration), and the drift of the parameter sensitivity in AR was suppressed from 0.74 AR/g to 0.02 AR/g with the temperature range from 330 K to 370 K and acceleration range from 0 g to 0.2 g.In a lidar system, replacing moving components with solid-state devices is highly anticipated to make a reliable and compact lidar system, provided that a substantially large beam area with a large angular extent as well as high angular resolution is assured for the lidar transmitter and receiver. A new quasi-solid-state lidar optical architecture employs a transmitter with a two-dimensional MEMS mirror for fine beam steering at a fraction of the degree of the angular resolution and is combined with a digital micromirror device for wide FOV scanning over 37 degree while sustaining a large aperture area of 140 mm squared. selleck products In the receiver, a second digital micromirror device is synchronized to the transmitter DMD, which enables a large FOV receiver. An angular resolution of 0.57°(H) by 0.23° (V) was achieved with 0.588 fps for scanning 1344 points within the field of view.