Kimhinton3196

rent plates, and also reflects the value of the coupled model in practical applications.Energy harvesting technology is regarded as a feasible solution for the continuous power supply of microelectronic devices. Efforts have been made to improve the output power of all kinds of energy harvesting devices. This paper reports a 2 × 2 array piezoelectric-electromagnetic hybrid energy harvester that achieves high power output through the combination of piezoelectric and electromagnetic conversion. The harvester included four piezoelectric-electromagnetic hybrid modules, each of which consisted of a piezoelectric sheet, a permanent magnet and a wound coil. The permanent magnet, also serving as the mass block of the cantilever beam when subjected to external stimulus, contributed to a large displacement of the vibration and generated high output power. At an acceleration of 1 g and a resonance frequency of 70.4 Hz, the measured maximum output power of the hybrid energy harvester was 66.08 mW, of which the piezoelectric and electromagnetic portions were 56.96 and 9.12 mW, respectively. Furthermore, in a charging experiment, a capacitor of 23.5 mF was charged to 11.5 V within 20 s, which demonstrates a practical application of the hybrid energy harvester for microelectronic devices.In this study, a novel refractive index sensor structure was designed consisting of a metal-insulator-metal (MIM) waveguide with two rectangular baffles and a U-Shaped Ring Resonator (USRR). The finite element method was used to theoretically investigate the sensor's transmission characteristics. The simulation results show that Fano resonance is a sharp asymmetric resonance generated by the interaction between the discrete narrow-band mode and the successive wide-band mode. Next, the formation of broadband and narrowband is further studied, and finally the key factors affecting the performance of the sensor are obtained. The best sensitivity of this refractive-index sensor is 2020 nm/RIU and the figure of merit (FOM) is 53.16. The presented sensor has the potential to be useful in nanophotonic sensing applications.As fabrication technologies advance, the packaging of MEMS device is being developed in two main directions MEMS device packaging and MEMS or sensor system integration [...].In this study, a dedicated dynamic measurement system was used to investigate the transient capacitance and recovery process of AlGaN/GaN lateral Schottky barrier diodes (SBDs). With the consideration of acceptor traps in the C-doped buffer, the C-V characteristics and transient capacitance were measured and analyzed, and the results were simulated and explained by Silvaco TCAD (technology computer aided design). The ionization of acceptor traps and the change of electric potential were monitored in transient simulation to investigate the origin of the capacitance collapse in the SBD. The results suggest the significant impact of traps in the GaN buffer layer on the capacitance collapse of the device, and the secondary capture effect on the variation of acceptor ionization. Based on the study of transient capacitance of SBD, this work could be extended to the Miller capacitance in high electron mobility transistor (HEMT) devices. Moreover, the report on the stability of capacitance is essential for GaN devices, and could be further extended to other aspects of device research.It is difficult to realize the stable control of a wheeled biped robot (WBR), as it is an underactuated nonlinear system. To improve the balance and dynamic locomotion capabilities of a WBR, a decoupled control framework is proposed. First, the WBR is decoupled into a variable-length wheeled inverted pendulum and a five-link multi-rigid body system. Then, for the above two simplified models, a time-varying linear quadratic regulator and a model predictive controller are designed, respectively. In addition, in order to improve the accuracy of the feedback information of the robot, the Kalman filter is used to optimally estimate the system state. The control framework can enable the WBR to realize changing height, resisting external disturbances, velocity tracking and jumping. The results obtained by simulations and physical experiments verify the effectiveness of the framework.Superdiffusion processes significantly promote the transport of tiny passive particles within biological fluids. Activity, one of the essential measures for living matter, however, is less examined in terms of how and to what extent it can improve the diffusivity of the moving particles. Here, bacterial suspensions are confined within the microfluidic channel at the state of bacterial turbulence, and are tuned to different activity levels by oxygen consumption in control. Systematic measurements are conducted to determine the superdiffusion exponent, which characterizes the diffusivity strength of tracer particles, depending on the continuously injecting energy converted to motile activity from swimming individuals. Higher activity is quantified to drastically enhance the superdiffusion process of passive tracers in the short-time regime. Moreover, the number density of the swimming bacteria is controlled to contribute to the field activity, and then to strengthen the super-diffusivity of tracers, distinguished by regimes with and without collective motion of interacting bacteria. Finally, the non-slip surfaces of the microfluidic channel lower the superdiffusion of immersed tracers due to the resistance, with the small diffusivity differing from the counterpart in the bulk. The findings here suggest ways of controlled diffusion and transport of substances within the living system with different levels of nutrition and resources and boundary walls, leading to efficient mixing, drug delivery and intracellular communications.To date, when considering the dynamics of water conveying multi-walled carbon nanoparticles (MWCNT) through a vertical Cleveland Z-staggered cavity where entropy generation plays a significant role, nothing is known about the increasing Reynold number, Hartmann number, and Darcy number when constant conduction occurs at both sides, but at different temperatures. The system-governing equations were solved using suitable models and the Galerkin Finite Element Method (GFEM). Based on the outcome of the simulation, it is worth noting that increasing the Reynold number causes the inertial force to be enhanced. The velocity of incompressible Darcy-Forchheimer flow at the middle vertical Cleveland Z-staggered cavity declines with a higher Reynold number. Enhancement in the Hartman number causes the velocity at the center of the vertical Cleveland Z-staggered cavity to be reduced due to the associated Lorentz force, which is absent when Ha = 0 and highly significant when Ha = 30. As the Reynold number grows, the Bejan number declines at various levels of the Hartmann number, but increases at multiple levels of the Darcy number.In this work, an mm-wave/THz MEMS switch design process is presented. The challenges and solutions associated with the switch electrical design, modeling, fabrication, and test are explored and discussed. To investigate the feasibility of this design process, the switches are designed on both silicon and fused quartz substrate and then tested in the 140-750 GHz frequency range. The measurement fits design expectations and simulation well. At 750 GHz the measurement results from switches on both substrates have an ON state insertion loss of less than 3 dB and an OFF state isolation larger than 12 dB.A specimen observed with a transmission electron microscope (TEM) was processed by focused ion beam (FIB) from a surface-micromachined polycrystalline silicon MEMS structure. Electron irradiation and in situ observation were performed on a selected grain boundary in the specimen. The grain boundary was observed and located by using lattice-oriented selective TEM photography. An evolution progress of amorphization of small silicon grain within the grain boundary and recrystallization of amorphous silicon were observed. learn more A silicon grain turned into several smaller bar grains within the grain boundary. The mechanism of grain-boundary evolution inducing a change of conductivity of polycrystalline silicon has been revealed. The conductivity of polycrystalline silicon influenced by electron irradiation could be attributed to the change of grain boundary.Monolithic integration of permanent micromagnets into MEMS structures offers many advantages in magnetic MEMS applications. A novel technique called PowderMEMS, based on the agglomeration of micron-sized powders by atomic layer deposition (ALD), has been used to fabricate permanent micromagnets on 8-inch wafers. In this paper, we report the fabrication and magnetic characterization of PowderMEMS micromagnets prepared from two different NdFeB powder particle sizes. A remanence of 423 mT and intrinsic coercivity of 924 mT is achieved at the low ALD process temperature of 75 °C, making this process compatible with MEMS technology. The magnetic reversible mechanism in the micromagnets is discussed with the help of the Wohlfarth equation. To ensure the operability of such integrated micromagnets in different application environments, we conducted a set of experiments to systematically investigate the thermal and corrosive stability. NdFeB micromagnets with larger powder particle size (d50 = 25 µm) exhibit high thermal stability in air. Furthermore, the corrosion stability of the micromagnets is significantly improved by an additional silicon oxide passivation layer deposited by plasma-enhanced chemical vapor deposition (PECVD). The presented results demonstrate the durability of PowderMEMS micromagnets, enabling their application in various fields, e.g., microfluidics, sensors, actuators, and microelectronics.Previous researchers mostly carried out simulation research and scattered experimental research on the static and dynamic characteristics of the digital valve, but did not form a systematic and in-depth study on the characteristics of the valve. Based on expounding the basic principles and functions of the valve and the test system, this paper carries out the test research under various variables for three kinds of static characteristics, including pressure differential-flow characteristics, signal-pressure characteristics, and signal-flow characteristics. The optimal control frequency of the valve is obtained from the comprehensive consideration of linear interval, linearity, and hysteresis. Three methods are systematically used to deeply study the dynamic characteristics, and the influencing factors of test results under various test conditions are analyzed. Through the research of this paper, it can provide relevant performance parameters for taking the digital valve as the system control element in the next step, and lay the foundation for the accurate control of the system.Microbubbles have important applications in optofluidics. The generation and growth of microbubbles is a complicated process in microfluidic channels. In this paper, we use a laser to irradiate light-absorbing particles to generate microbubbles in capillary tubes and investigate the factors affecting microbubble size. The results show that the key factor is the total area of the light-absorbing particles gathered at the microbubble bottom. The larger the area of the particles at bottom, the larger the size of the microbubbles. Furthermore, the area is related to capillary tube diameter. The larger the diameter of the capillary tube, the more particles gathered at the bottom of the microbubbles. Numerical simulations show that the Marangoni convection is stronger in a capillary tube with a larger diameter, which can gather more particles than that in a capillary tube with a smaller diameter. The calculations show that the particles in contact with the microbubbles will be in a stable position due to the surface tension force.